Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1994-10-06
1995-12-19
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
With light attenuation
2502013, G01B 1114
Patent
active
054773334
ABSTRACT:
A displacement detecting apparatus for detecting a displacement between an object lens thereof and a measured surface in a non-contact manner. The displacement detecting apparatus comprises an object lens for focusing laser beam on the measured surface. A detecting optical system is provided to detect a focus error signal which represents a difference between a distance of the object lens from the measured surface and a focal distance of the object lens, in accordance with a reflected light from the measured surface. An actuator is provided to move the object lens in an optical axis in a manner to cause the object lens distance to coincide with the focal distance, in accordance with an output signal from the detecting optical system. A moving body includes a linear scale or a scale head and movable with the object lens. The linear scale is disposed coaxially with the optical axis and connected to the actuator. A support member is provided to movably support the moving body. Additionally, a balance weight is connected to the moving body in a manner that the center of gravity of the moving body coincides with the center of driving force of said actuator and with the center of support of the support member.
REFERENCES:
patent: 4148587 (1979-04-01), Erdmann et al.
patent: 5220550 (1993-06-01), Nakayama et al.
patent: 5247165 (1993-09-01), Hiruta et al.
Shoda Yoshio
Takeda Narimasa
Pham Hoa Q.
Sony Magnescale Inc.
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