Displacement controller for fine positioning device

Geometrical instruments – Gauge – Work support

Patent

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Details

33568, 33 1M, 318646, G01B 700

Patent

active

050052985

ABSTRACT:
A controller for a fine positioning device constructed of planar structural units connected symmetrically and equipped individually with planar flexible beams arranged in an opposing relation between two rigid members and actuators for applying forces between the two rigid members includes displacement detection devices, displacement setting devices, sensor devices for determining the degree of each translational displacement and the degree of each angular displacement, and control devices for controlling the voltages to be applied to the respective actuators.

REFERENCES:
patent: 4019109 (1977-04-01), McCoy et al.
patent: 4575942 (1986-03-01), Moriyama
patent: 4617498 (1986-10-01), Ruppert
patent: 4686440 (1987-08-01), Hatamura et al.

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