Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1997-11-25
1999-11-30
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310360, 310348, H01L 4104
Patent
active
059948213
ABSTRACT:
Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.
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Imada Katsumi
Kawasaki Osamu
Otsuchi Tetsuro
Sugimoto Masato
Tomita Yoshihiro
Dougherty Thomas M.
Matsushita Electric - Industrial Co., Ltd.
Medley Peter
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