Displacement apparatus, litographic apparatus, device...

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C414S935000, C355S072000, C355S053000

Reexamination Certificate

active

10855962

ABSTRACT:
A displacement apparatus comprising a first part and a second part, which can be displaced relative to each other in first and second different directions. The apparatus being suitable for use in a lithographic apparatus for positioning the mask holder with respect to the projection beam and for positioning the wafer substrate table with respect to the patterned beam. The first part comprises a first and second coil system in which an alternating current is provided by a power supply. The second part comprises a conductive platen which is disposed in a zone in which a magnetic field is induced when power is supplied to the coil systems. The coil system and platen are arranged with respect to each other so that when currents are passed through the coils, a magnetic field induced in the platen causes displacement between the platen and the coils in the first and second different directions.

REFERENCES:
patent: 5309049 (1994-05-01), Kawada et al.
patent: 5334892 (1994-08-01), Chitayat
patent: 6175169 (2001-01-01), Hollis et al.
patent: 0 480 547 (1992-04-01), None
patent: 0 480 549 (1992-04-01), None
patent: 1 215 805 (2002-06-01), None
H. Hayashiya, et al., “A Novel Combined Lift and Propulsion System for a Steel Plate Conveyance by Electromagnets,” vol. 34 (No. 4), p. 2093-2095, (Jul. 1998).
H. Hayashiya, et al., “A Combined Lift and Propulsion System of a Steel Plate by Transverse Flux Linear Induction Motors,” vol. 35 ( No. 5), p. 4019-4021, (Sep. 1999).
European Search Report completed Nov. 10, 2003.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Displacement apparatus, litographic apparatus, device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Displacement apparatus, litographic apparatus, device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Displacement apparatus, litographic apparatus, device... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3742190

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.