Displacement actuation and sensing for an electrostatic drive

Details Displacement actuation and sensing for an electrostatic drive Displacement actuation and sensing for an electrostatic drive

2008-09-04

2011-12-13

Ro, Bentsu (Department: 2837)

Electricity: motive power systems

Positional servo systems

With particular motor control system responsive to the...

C310S309000

Reexamination Certificate

active

08076893

ABSTRACT:
An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.

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