Dispatch integration system and method based on...

Details Dispatch integration system and method based on... Dispatch integration system and method based on...

2007-05-15

2007-05-15

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

11401900

ABSTRACT:
A dispatch integration method based on semiconductor manufacturing. When multiple tools are idle, idle messages are sent to a real-time dispatch system through a tool control system and a manufacturing execution system. The real-time dispatch system sorts tool parameters relating to tool efficiency based on a currently executed process using a principal component analysis method, defining weights of each tool according to the defined tool parameters and corresponding factor weights using a linear regression weight formula, calculating tool weights of each tool parameter using a linear regression weight formula, and determining a desired tool for dispatch according to the calculated tool weights.

REFERENCES:
patent: 5914879 (1999-06-01), Wang et al.
patent: 2005/0113955 (2005-05-01), Chien
patent: 2005/0256599 (2005-11-01), Peng

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