Disk scanning apparatus for batch ion implanters

Details Disk scanning apparatus for batch ion implanters Disk scanning apparatus for batch ion implanters

1989-09-15

1990-10-23

Berman, Jack I.

Radiant energy

Supported for nonsignalling objects of irradiation

2504922, 285114, 403 51, H01J 3720

Patent

active

049658620

ABSTRACT:
A mechanical scanning system for a batch ion implanter includes a disk for mounting wafers at sites near its periphery and a disk drive assembly for rotating the disk. The disk and the disk drive assembly are supported in an end station vacuum chamber by a scan arm which extends through a sealed opening in an access door. A scan drive assembly attached to the access door scans the scan arm and the disk in an arc-shaped path. Simultaneous rotation and scanning of the disk cause the ion beam to be distributed over the surfaces of the wafers mounted on the disk. A pivot drive assembly rotates the scan arm and the disk about a pivot axis between an implant position and a load/unload position. A bellows seals the scan arm to the vacuum chamber while tranmitting arc-shaped movement into the vacuum chamber. A bellows guide apparatus guides an intermediate portion of the bellows so as to limit lateral distortion caused by pressure differences applied to the bellows in combination with asymmetrical deflection thereof.

REFERENCES:
patent: 3242499 (1966-03-01), Fonda-Bonardi et al.
patent: 4899059 (1990-02-01), Freytsis et al.

Affiliated with

Also associated with

Rating

Disk scanning apparatus for batch ion implanters does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Disk scanning apparatus for batch ion implanters, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Disk scanning apparatus for batch ion implanters will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-772679