Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate
2005-07-19
2005-07-19
McDonald, Rodney G. (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
C204S192200, C156S345310, C156S345320, C118S719000, C414S217000, C414S225010, C414S226020
Reexamination Certificate
active
06919001
ABSTRACT:
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.
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Bluck Terry
Fairbairn Kevin P.
Marion Craig
Weiss Robert E.
Cole Stanley Z.
Intevac, Inc.
McDonald Rodney G.
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