Cleaning and liquid contact with solids – Semiconductor wafer
Patent
1990-03-07
1992-04-28
Cuchlinski, Jr., William A.
Cleaning and liquid contact with solids
Semiconductor wafer
134153, 134200, B08B 302
Patent
active
051078805
ABSTRACT:
A disk cleaning apparatus includes an enclosed housing with a door mounted on the forward wall of the housing operable between open and closed positions. In the preferred embodiment, the door is mounted so as to move away from the front wall of the housing, generally parallel thereto, between opened and closed positions. The housing includes an apparatus for spraying fluid on disks located within a disk retaining cradle is powered so as to rotate the disks during the spraying process. A motor mounted within the housing is connected through a drive train in the door to the disk retaining cradle, so as to rotate the cradle. A drive coupler has a forward half operably mounted in the door and connected to the drive train, and a second half operably mounted in the housing connected to the motor, such that rotational energy from the motor will be transmitted through the drive coupler and drive train to the disk retaining cradle when the door is in a closed position. The forward and rearward halves of the drive coupler are separable so as to prevent transmission of rotational energy from the motor when the door is in an open position.
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Cuchlinski Jr. William A.
Dowling William C.
Pathway Systems, Inc.
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