Disk carrier

Details Disk carrier Disk carrier

1989-03-27

1989-11-14

Nguyen, Nam X.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, 118500, C23C 1434, B05C 1114

Patent

active

048805181

ABSTRACT:
A disk carrier is comprised of a carrier plate having one or more throughholes at which disks are carried with both surfaces exposed to be processed. Abutting and partially around each of these throughholes is a recess such that not only can a disk be easily positioned at the throughhole without having its surface scratched but also a corner is formed in this recessed region which can serve as an indexing depression. For this purpose, the recess may be fomed with a bottom surface parallel to the surface of the carrier plate and boundary wall in the form of a part of a polygon such that two mutually adjacent straight parts thereof, together with the bottom surface, form a corner which can serve as a reference position easily accessible by a touch sensor.

REFERENCES:
patent: 4473455 (1984-09-01), Dean et al.
patent: 4589369 (1986-05-01), Mahler
patent: 4595481 (1986-06-01), Allen et al.
patent: 4634512 (1987-01-01), Allen et al.
patent: 4650064 (1987-03-01), Slabaugh
patent: 4735701 (1988-04-01), Allen et al.

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