Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1985-11-15
1987-01-06
Demers, Arthur P.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
118500, 118501, 118502, 118503, 118504, 118505, 2041921, 2041922, 220230, 2922515, 292347, 292358, C23C 1500
Patent
active
046345124
ABSTRACT:
A carrier is provided to hold a central apertured disk while magnetic material is plated simultaneously on the annular surfaces on both sides of the disk. The carrier contains a first opening substantially the same diameter as the disk and a second opening formed about a center line offset from the center line of the first opening so as to form a recess around a portion of the edge of the first opening. The disk is inserted into the first opening and recess to block the flow of plasma and impurities from one side of the disk to the other during the disk surface coating. A two-part plug is provided for placement in and sealing the center aperture of the disk. One plug part contains a spring or magnetic means for holding the two parts together within the disk. The plug includes a knob for handling, carrying and mounting or removing the disk from the carrier. A plurality of openings is provided in the carrier to allow both surfaces of a corresponding plurality of disks to be coated simultaneously with magnetic media with plugs sealing the central aperture of each disk during processing.
REFERENCES:
patent: 2911347 (1959-11-01), Gutzmer
patent: 3141989 (1964-07-01), Jones et al.
patent: 4223799 (1980-09-01), Eyster et al.
patent: 4282924 (1981-08-01), Faretra
patent: 4473455 (1984-09-01), Dean et al.
patent: 4485000 (1984-11-01), Kawaguchi
patent: 4500407 (1985-02-01), Boys et al.
patent: 4505007 (1985-03-01), Aoki
patent: 4558388 (1985-12-01), Graves et al.
Lennon IBM Tech. Disc. Bull. 22 (1980) pp. 5354-5.
Allen Ronald
Chen Tu
Caserza Steven F.
Demers Arthur P.
Komag, Inc.
MacDonald Thomas S.
MacPherson Alan H.
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