Dishing avoidance in wide soft metal wires

Details Dishing avoidance in wide soft metal wires Dishing avoidance in wide soft metal wires

1998-09-29

2000-08-01

Arbes, Carl J.

Metal working

Method of mechanical manufacture

Electrical device making

29827, 29846, H01K 310

Patent

active

060948124

ABSTRACT:
A method of manufacturing semiconductor circuits or electronic packages is provided. The step of splitting up wide metal areas into metal stripes is included into the physical design step of such devices. This method does not increase the data complexity significantly and guarantees correctness of the design. Furthermore, the method allows to solve the dishing problem that is inherent to copper wiring technologies.

REFERENCES:
patent: 5678301 (1997-10-01), Gochnour et al.

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