Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1991-08-22
1993-03-23
Rosenberger, Richard A.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356239, 356338, 25022723, 250223B, G01N 2100, H01J 516
Patent
active
051969017
ABSTRACT:
A surface contamination monitor which discriminates between different types of surface contamination and irregularities is provided with a horizontal sensing plate, a light detector positioned under the plate, a narrow bandpass filter disposed between the plate and the detector, and optical lenses. At one end of the sensing plate is included three laser diodes, while at the other end is located a coupling prism. Beams from the laser diodes strike the coupling prism and are directed at different angles so as to either strike the exposed surface of the sensing plate or become trapped within the sensing plate. Variations in the reactions of the different beams to different contaminants and irregularities on the exposed sensing plate surface allow the light detector to discriminate between dust, molecular films , and scratches and craters on the exposed surface.
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patent: H376 (1987-12-01), Bremer
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patent: 3894806 (1975-07-01), Remy et al.
patent: 3988068 (1976-10-01), Sprague
patent: 4456374 (1984-06-01), Langberg
patent: 4629318 (1986-12-01), Malek et al.
patent: 4808813 (1989-02-01), Champetier
EOS Technologies Inc.
Pham Hoa Q.
Rosenberger Richard A.
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