Discretely controlled micromirror array device with...

Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces

Reexamination Certificate

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Details

C359S872000, C359S292000

Reexamination Certificate

active

07488082

ABSTRACT:
This invention provides a discretely controlled micromirror array device comprising a plurality of micromirrors. The discretely controlled micromirror array device forms multiple surface profiles, wherein the rotational and translational motion of each micromirror is discretely controlled by selectively activating different groups of segmented electrodes using a control circuitry. The discretely controlled micromirror array device is compatible with known semiconductor electronics technologies and provides structural stability and efficiency in motion.

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