Discontinuous conveyor system

Details Discontinuous conveyor system Discontinuous conveyor system

2005-09-28

2010-02-16

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

Reexamination Certificate

active

07661919

ABSTRACT:
The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.

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“ITRS 2003 Factory Integration Chapter Material Handling Backup Section,” International Technology Roadmap for Semiconductors, Date Considered: Sep. 4, 2003.

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