Discharge radiation source, in particular UV radiation

Details Discharge radiation source, in particular UV radiation Discharge radiation source, in particular UV radiation

2003-06-27

2008-09-02

Berman, Jack I. (Department: 2881)

Radiant energy

Radiant energy generation and sources

C250S492200, C250S50400H, C250S426000, C378S119000, C315S111210, C372S076000, C372S069000

Reexamination Certificate

active

07420191

ABSTRACT:
The invention concerns a radiation source, comprising an anode (2), a cathode (3), an electric discharge gap (4) between the anode (2) and the cathode (3) and a gas input conduit (30) in the discharge gap (4). The gas input conduit (30) is electrically connected to the anode and the cathode. The invention is characterized in that the gas input conduit (30) is supplied with gas by a gas supply conduit (32), designed to form between its portion (42) connected to the gas input conduit (30) and another of its portions connected to a fixed potential, an electric impedance such that it counters the generation of electric discharges inside the gas input conduit (30).

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Robert et al.: “Spectroscopic and energetic investigation of capillary discharges devoted to EUV production for new lithography generation” Emerging Lithographic Technologies V, Proceedings Of SPIE, vol. 4343, Aug. 2001, pp. 566-575, XP008018784 Bellingham, USA p. 566-p. 567.

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