Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-11-06
2007-11-06
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S505100
Reexamination Certificate
active
11493945
ABSTRACT:
An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source may have a debris shield that may comprise a plurality of curvilinear shield members having inner and outer surfaces connected by light passages aligned to a focal point, which shield members may be alternated with open spaces between them and may have surfaces that form a circle in one axis or rotation and an ellipse in another. The source may have a temperature control mechanism operatively connected to the collector and operative to regulate the temperature of the respective shell members to maintain a temperature related geometry optimizing the glancing angle of incidence reflections from the respective shell members, or a mechanical positioner to position the shell members.
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Blumenstock Gerry M.
Bowering Nortbert
Fomenkov Igor V.
Oliver I. Roger
Pan Xiaojiang
Cray William
Cymer Inc.
Nguyen Kiet T.
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