Discharge lamp

Details Discharge lamp Discharge lamp

1978-03-29

1980-02-26

Demeo, Palmer C.

Electric lamp and discharge devices

With magnetic device

Field transverse to discharge

313220, 313225, H01J 6116, H01J 6120, H01J 6130

Patent

active

041907868

ABSTRACT:
A discharge lamp of the type which seals mercury and a rare gas in a bulb having sealed therein a pair of electrodes and in which both the mercury and the rare gas contribute to discharge radiation. Letting the value of the quantity of mercury (mg/cc.) sealed per 1 cc. of the volume of the bulb and the value of the (atmospheric) pressure of the rare gas be represented by X and Y, respectively, the values X and Y are selected to be in the ranges of 1.ltoreq.X.ltoreq.13 and 2.ltoreq.Y.ltoreq.10, respectively, whereby to abundantly emit ultraviolet rays of the wavelengths between 2000 to 2500 A. The discharge lamp is employed as a light source for photolithography in the manufacture of semiconductor devices to achieve the formation of a fine pattern in a short time.

REFERENCES:
patent: 2707247 (1955-04-01), Anderson, Jr,.
patent: 2896107 (1959-07-01), Anderson, Jr.
patent: 2990490 (1961-06-01), Heine-Geldern
patent: 3786297 (1974-01-01), Zollweg et al.
patent: 4038578 (1977-07-01), Mathijssen

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