Discharge excitation gas laser device

Details Discharge excitation gas laser device Discharge excitation gas laser device

1991-12-18

1993-12-14

Scott, Jr., Leon

Coherent light generators

Particular component circuitry

Optical pumping

372 83, 372 69, 372 37, H01S 300

Patent

active

052710262

ABSTRACT:
In a discharge excitation gas laser device such as an excimer laser device provided with laser medium gas and a pair of electrodes opposite to each other in a gas-tight vessel, the laser medium gas is discharge-excited while inverting the polarity of a DC pulse voltage applied to the pair of electrodes opposite to each other for every pulse. In this way distribution of atoms and ions constituting the laser medium gas in the discharge region including the neighborhood of the main electrodes is made uniform even at a high repetition rate oscillation. Thus it is possible to realize a discharge excitation gas laser device having a good stability of DC pulse discharge without increasing unnecessarily the flow speed of the laser medium gas and no lowering in the pulse energy owing to a high efficiency operation.

REFERENCES:
patent: 3818373 (1974-06-01), Chun et al.
patent: 4397025 (1983-08-01), Kebabian
patent: 4504951 (1985-03-01), McMahan et al.
patent: 4635265 (1987-01-01), O'Harra, II
patent: 4763336 (1988-08-01), Stephens
H. T. W. Tromp, et al. "Bipolar Pulsing Circuits for High Power High Rep Rate Lasers", IEEE jounrnal, copyright 1990.
A. Sylvan, et al, "Compact High Repetition Rate Magnetically Switched Transverse, Electric, Atmospheric CO.sub.2 Laser," Review of Scientific Instruments, vol. 61, No. 7, pp. 1821-1824, Jul. 1990.
T. McKee, et al "A High-Power Long Pulse Excimer Laser," IEEE Photonics Technology Letters, vol. 1, No. 3, pp. 59-61, Mar. 1989.

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