Discharge excitation gas laser apparatus

Details Discharge excitation gas laser apparatus Discharge excitation gas laser apparatus

1992-05-22

1994-05-17

Scott, Jr., Leon

Coherent light generators

Particular pumping means

Electrical

372 38, 372 87, 372 82, H01S 3097

Patent

active

053134877

ABSTRACT:
At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.

REFERENCES:
patent: 4611327 (1986-09-01), Clark et al.
patent: 4837773 (1989-06-01), Wakata et al.
patent: 5890021 (1992-02-01), Nakatani et al.

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