Discharge electrode, shape-restoration thereof, excimer laser os

Details Discharge electrode, shape-restoration thereof, excimer laser os Discharge electrode, shape-restoration thereof, excimer laser os

1997-02-28

1999-07-13

Lee, John D.

Coherent light generators

Particular active media

Gas

372 87, H01S 322

Patent

active

059236930

ABSTRACT:
A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.

REFERENCES:
patent: 4810851 (1989-03-01), Fridlyand
patent: 4891818 (1990-01-01), Levatter
patent: 4956847 (1990-09-01), Terai et al.
patent: 4956848 (1990-09-01), Terai et al.
patent: 5009963 (1991-04-01), Ohmi et al.
patent: 5187716 (1993-02-01), Haruta et al.
patent: 5224998 (1993-07-01), Ohmi et al.
patent: 5295668 (1994-03-01), Ohmi et al.
patent: 5407492 (1995-04-01), Ohmi et al.
IEEE Transactions on Semiconductor Manufacturing, "Flourine Passivation of Metal Surface for Self-Cleaning Semiconductor Equipment", Feb. 1990, vol. 3, pp. 42-51.

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