Discharge abnormality detection device and method for use in wir

Metal fusion bonding – Process – With measuring – testing – indicating – inspecting – or...

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228 565, 219 5621, 219 5622, H01L 2160

Patent

active

059884827

ABSTRACT:
A device and method is available for detecting abnormalities of an electric discharge generated for forming a ball at the end of a bonding wire in a bonding apparatus. A high voltage is applied across the bonding wire and an electrode, and the maximum value of the applied high voltage is detected and sent, via a peak hold circuit, to a computer that compares the maximum high voltage with an insulation breakdown voltage of a normal detection range and calculates a gap between the end of the bonding wire and the electrode, thus determining the discharge abnormalities based upon the result of the calculation of the gap.

REFERENCES:
patent: 4687897 (1987-08-01), McKiel, Jr.
patent: 5463197 (1995-10-01), Miyazaki
patent: 5763849 (1998-06-01), Nakao

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