Disc support structure and method of producing the same

Details Disc support structure and method of producing the same Disc support structure and method of producing the same

1974-03-20

1976-06-08

White, Robert F.

Plastic and nonmetallic article shaping or treating: processes

Gas or vapor deposition of article forming material onto...

264138, 264159, B29C 1300, B29C 1710

Patent

active

039623912

ABSTRACT:
A support structure composed of Si or SiC for supporting semiconductor crystal discs during annealing or doping thereof. A somewhat tube-shaped member having at least one flat side is formed by thermal deposition of a gaseous silicon compound onto a similarly shaped carrier member and the tube-shaped member is then cut and mechanically processed in directions parallel and perpendicular to the axes of the tube to form a support structure having a flat base and upwardly extending curved side walls.

REFERENCES:
patent: 3157718 (1964-11-01), O'Leary
patent: 3746496 (1973-07-01), Dietze et al.
patent: 3747559 (1973-07-01), Dietze
patent: 3751539 (1973-08-01), Reuschel
patent: 3807979 (1974-04-01), Cromwell

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