Disc resonator gyroscope fabrication process requiring no...

Details Disc resonator gyroscope fabrication process requiring no... Disc resonator gyroscope fabrication process requiring no...

2007-07-25

2010-10-26

Williams, Hezron (Department: 2856)

Metal working

Method of mechanical manufacture

Electrical device making

C073S504120

Reexamination Certificate

active

07818871

ABSTRACT:
A method of fabricating a resonant vibratory sensor, such as a disc resonator gyro. A silicon baseplate wafer for a disc resonator gyro is provided with one or more locating marks. The disc resonator gyro is fabricated by bonding a blank resonator wafer, such as an SOI wafer, to the fabricated baseplate, and fabricating the resonator structure according to a pattern based at least in part upon the location of the at least one locating mark of the fabricated baseplate. MEMS-based processing is used for the fabrication processing. In some embodiments, the locating mark is visualized using optical and/or infrared viewing methods. A disc resonator gyroscope manufactured according to these methods is described.

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