Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1995-01-17
1996-08-06
Breneman, R. Bruce
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20429811, 20429823, 20429825, 414222, 414225, 414217, 414729, 414731, 118728, 118729, C23C 1450, B65H 100
Patent
active
055430228
ABSTRACT:
A disc-handling apparatus for supporting a magnetic disc during material deposition and for transporting the disc into and out of a deposition station is described. The apparatus has a holder that supports a disc at three contact points by a support and a pair of arms, such that the disc is positively gripped by at least three contact points.
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patent: 4936329 (1990-06-01), Michael et al.
patent: 4981408 (1991-01-01), Hughes et al.
patent: 5205919 (1993-04-01), Zejda
patent: 5215420 (1993-06-01), Hughes et al.
patent: 5259603 (1993-11-01), Geisler et al.
Harper Bruce M.
Nguyen Hoang
Breneman R. Bruce
Dehlinger Peter J.
HMT Technology Corporation
McDonald Rodney G.
Mohr Judy M.
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