Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Patent
1997-05-28
1999-11-09
Hoff, Marc S.
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
702155, G01B 1124
Patent
active
059831677
ABSTRACT:
A method for measuring dishing in discs, including the steps of irradiating a laser beam along a scanning line which spirals from an inner side to an outer side of a surface of a magneto-optical disc or a digital video disc; determining a tilt angle at each of a plurality of measurement points on the scanning line based on displacement of a reflected laser beam from a normal reflected position; and using a measurement point on a first circuit on the inner side of the scanning line as a reference to determine dishing amounts at corresponding measurement points on circuits after the first circuit based on the tilt angles.
REFERENCES:
patent: 5540967 (1996-07-01), Toide et al.
patent: 5646415 (1997-07-01), Yanagisawa
patent: 5684778 (1997-11-01), Yamada et al.
patent: 5726969 (1998-03-01), Moriya et al.
patent: 5815255 (1998-09-01), Van Ochten et al.
Dainippon Ink and Chemicals Inc.
Hoff Marc S.
Patterson Kendrick P.
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