Directional atomic force microscope and method of observing a sa

Details Directional atomic force microscope and method of observing a sa Directional atomic force microscope and method of observing a sa

1994-11-09

1996-04-02

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

055030106

ABSTRACT:
An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.

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