Directional accelerometer and its microlithographic fabrication

Details Directional accelerometer and its microlithographic fabrication Directional accelerometer and its microlithographic fabrication

1984-12-27

1987-03-31

Levy, Stewart J.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517B, G01P 15125

Patent

active

046533265

ABSTRACT:
A directional accelerometer and a process for the microlithographic fabrication of such an accelerometer. The accelerometer includes a substrate having at least one recess to define at least one beam in the substrate. One of the ends of the beam is integrally formed with the remainder of the substrate. The beam, which is oriented in the first direction, is deformable into the recess in a second direction only, parallel to the substrate surface and perpendicular to the first direction. The second direction corresponds to the acceleration component to be measured. Electrical connections and contacts are formed in the substrate for the device measuring the deformations of the beam. These measurements make it possible to determine the acceleration components.

REFERENCES:
patent: 3877313 (1975-04-01), Ferriss
patent: 4050049 (1977-09-01), Youmans
patent: 4094199 (1978-06-01), Holdren et al.
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4553436 (1985-11-01), Hansson
Roylance et al., `A Batch-Fabricated Silicon Accelerometer`, IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979.
Jolly et al., `Miniature Cantilever Beams Fabricated by Arisotropic Etching of Silicon`, Dept. of Electrical Engineering, U. of California, Berkeley, Mar., 1980.

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