Measuring and testing – Volume or rate of flow – Thermal type
Patent
1988-09-16
1990-01-02
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
73189, G01F 168
Patent
active
048904899
ABSTRACT:
A direction-sensitive flow velocity meter in which at least first and second thermocouples of the Seebeck type are arranged in a symmetrical layout in a common semiconductor substrate. The configuration is such that imaginary lines joining the junction ends of the thermocouples each extend parallel to perpendicular flow velocity components, with the heating element or electronic circuitry for processing the thermocouple voltages being integrated into the common substrate at surface areas free of the thermocouples.
REFERENCES:
patent: 4332157 (1982-06-01), Zemel et al.
patent: 4373386 (1983-02-01), Schuddemat et al.
patent: 4561303 (1985-12-01), McCarthy
patent: 4637253 (1987-01-01), Sekimura et al.
Bronkhorst High-Tech B.V.
Goldstein Herbert
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