Directed growth of nanotubes on a catalyst

Details Directed growth of nanotubes on a catalyst Directed growth of nanotubes on a catalyst

2007-08-21

2007-08-21

Cygan, Michael (Department: 2855)

Coating processes

Direct application of electrical, magnetic, wave, or...

Electromagnetic or particulate radiation utilized

C427S595000, C427S552000, C427S561000

Reexamination Certificate

active

11387561

ABSTRACT:
A nanostructure is fabricated using charged particle deposition to deposit a catalyst on a substrate. A charged particle beam is directed to location on the substrate where the catalyst is to be deposited, with a beam-activated precursor gas also being directed to the location. For example, a nickel dot can be selectively deposited onto a substrate by using a charged particle beam to decompose a nickel-containing precursor gas, and then a carbon nanotube can be grown on the nickel dot, with the diameter of the nanotube conforming to the size of the nickel dot.

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