Direct-write system and method for roll-to-roll...

Details Direct-write system and method for roll-to-roll... Direct-write system and method for roll-to-roll...

2006-08-01

2006-08-01

Lavarias, Arnel C. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S566000

Reexamination Certificate

active

07085057

ABSTRACT:
A reflective grating for precision location measurement. In one embodiment, the reflective grating has a non-reflective substrate and a non-reflective adhesion layer disposed on the substrate layer. A reflective surface layer is disposed on the adhesion layer. In another embodiment, the reflective grating is manufactured on the reflective (polished) surface of a monolithic substrate. A series of grating lines are formed in the reflective surface layer by vaporizing portions of the reflective surface layer with a laser in order to expose the non-reflective adhesion layer. Accordingly, alternating reflective and non-reflective grating lines are formed that are used for making precision measurements.

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