Direct-write silicon nitride EEPROM cell

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357 54, H01L 2978

Patent

active

046162453

ABSTRACT:
An EEPROM cell which is programmed to a 1 or .0. binary state regardless of the prior state of the cell, that is, without erasing. The cell construction includes silicon nitride capacitors between the floating gate and the programming electrodes which enhances the programming characteristics and the endurance and permits the use of a relatively simple double layer polysilicon process and semiconductor structure.

REFERENCES:
patent: 4099196 (1978-07-01), Simko
patent: 4274012 (1981-06-01), Simko
patent: 4314265 (1982-02-01), Simko
patent: 4334292 (1982-06-01), Kotecha
patent: 4486769 (1984-12-01), Simko
patent: 4532535 (1985-07-01), Gerber et al.
Sze, S. M., Physics of Semiconductor Devices, Wiley, New York, 1981, pp. 402-404.
Neugebauer et al., "Electrically Erasable Buried-Gate Nonvolatile Read-Only Memory", IEEE Transactions on Electron Devices, vol. ED-24, No. 5, May 1977.

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