Direct view infrared MEMS structure

Details Direct view infrared MEMS structure Direct view infrared MEMS structure

1999-08-05

2000-10-31

Hannaher, Constantine

Radiant energy

Infrared-to-visible imaging

Including detector array

250366, 25032008, 2503381, H01L 2714, G01J 520

Patent

active

061406465

ABSTRACT:
An apparatus and process for forming an infrared imager suitable for night vision surveillance systems. The infrared imager includes an array of field emissive devices formed within a semiconductor substrate such as a silicon wafer. The field emissive devices each include silicon emitters formed within the silicon substrate and a micro-cantilever including a conductive gate plate suspended above the emitters. The micro-cantilever is formed of a bi-material and bends in response to absorbed infrared radiation, locally changing an electric field applied to the structure, and therefore, the emission current of the emitters. Electrons emitted from the emitters form a visible image on a phosphor plate.

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