Electric heating – Metal heating – By arc
Reexamination Certificate
2011-03-22
2011-03-22
Paschall, Mark H (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C118S7230IR, C156S345280
Reexamination Certificate
active
07910853
ABSTRACT:
A method and apparatus for controlling power output of a capacitatively-coupled plasma are provided. A detector is disposed on the power delivery conduit carrying power to one electrode to detect fluctuations in power output to the electrode. The detector is coupled to a signal generator, which converts the RF input signal to a constant control signal. A controller adjusts power input to the RF generator by comparing the control signal to a reference.
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Chang Mei
Chang Yu
Huston Joel M.
Kao Chien-Teh
Kuang William
Applied Materials Inc
Paschall Mark H
Patterson & Sheridan LLP
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