Direct measurement of the electron beam of a scanning electron m

Details Direct measurement of the electron beam of a scanning electron m Direct measurement of the electron beam of a scanning electron m

1977-02-04

1978-04-25

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250311, G01N 2700

Patent

active

040864910

ABSTRACT:
Apparatus for measuring the electron beam diameter of a scanning electron croscope includes: a transducer which supports a heated wire acting as a knife edge; an electron collector; and a display. The electron beam is scanned across the knife edge to obtain a change in current density which is received by the electron collector and shown as a trace on the display. This trace is a relative measurement of electron beam diameter. The electron beam is scanned a second time with the transducer moving the heated wire abruptly during the second scan to cause a shift in the current density trace on the display. The amount of shift between the traces of the initial and second scans is a reference distance against which the relative measurement of electron beam diameter may be measured.

REFERENCES:
patent: 3638111 (1972-01-01), Ennis et al.
patent: 3736422 (1973-05-01), Weber et al.
patent: 3784909 (1974-01-01), Schutt et al.

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