Direct measurement of photodiode impedance using electron beam p

Details Direct measurement of photodiode impedance using electron beam p Direct measurement of photodiode impedance using electron beam p

1988-09-14

1989-12-05

Eisenzopf, Reinhard J.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158R, 324 73R, 250310, 250311, G01R 3128, G01R 3126

Patent

active

048855340

ABSTRACT:
Photodiode testing apparatus having the capability of directly measuring photodiode impedance. An E-beam machine is used for photodiode testing, the beam being selectively directed to different diodes in an array. A varying level of infrared flux is applied to the photodiode, causing the photodiode to develop ac voltage and current signals which are used for the direct measurement of impedance.

REFERENCES:
patent: 2683794 (1954-07-01), Briggs et al.
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4730158 (1988-03-01), Kasai et al.

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