Direct loadlock interface

Details Direct loadlock interface Direct loadlock interface

1995-02-27

1996-12-24

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

With soil removing, coating, lubricating, sterilizing and/or...

Suction hoods and off-takes

141 1, 141 91, 141 94, 141 98, 414217, 414331, 414939, 414940, B65G 6500

Patent

active

055865852

ABSTRACT:
A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.

REFERENCES:
patent: 4705444 (1987-11-01), Tullis et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4746256 (1988-05-01), Boyle et al.
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 5217053 (1993-06-01), Foster et al.
patent: 5277579 (1994-01-01), Takanabe
patent: 5340261 (1994-08-01), Oosawa et al.
patent: 5405230 (1995-04-01), Ono et al.
patent: 5433574 (1995-07-01), Kawano et al.
patent: 5468111 (1995-11-01), Flint et al.
patent: 5478195 (1995-12-01), Usami

Affiliated with

Also associated with

Rating

Direct loadlock interface does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Direct loadlock interface, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Direct loadlock interface will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1173392