Direct-heated flow measuring apparatus having improved response

Measuring and testing – Volume or rate of flow – Thermal type

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731182, G01F 168

Patent

active

048708607

ABSTRACT:
In a direct-heated flow measuring apparatus including a substrate having a film resistance pattern and a supporting member for supporting the substrate, the supporting member has good heat dissipation characteristics. Provided between the substrate and the supporting member is a heat transfer throttling portion.

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