Direct-heated flow measuring apparatus

Details Direct-heated flow measuring apparatus Direct-heated flow measuring apparatus

1986-01-30

1988-11-15

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320421, 7320426, G01F 168

Patent

active

047839961

ABSTRACT:
A direct-heated flow measuring apparatus including a substrate, a film resistor for generating heat and sensing its temperature, and a feedback control circuit for controlling the heat generated by the film resistor so that the temperature of the film resistor is a predetermined value. Also, provided in the substrate is an aperture or the like for throttling the heat transfer of the film resistor. Further, a reinforced structure is formed on the part of substrate where the aperture or the like is formed.

REFERENCES:
patent: 3359462 (1967-12-01), Schutze et al.
patent: 4320655 (1982-03-01), Kammermaier et al.
patent: 4498337 (1985-02-01), Gruner
patent: 4501144 (1985-02-01), Higashi et al.
patent: 4542650 (1985-09-01), Renkin et al.
patent: 4554829 (1985-11-01), Sumal
patent: 4594889 (1986-06-01), McCarthy

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