Direct exposure apparatus and direct exposure method

Details Direct exposure apparatus and direct exposure method Direct exposure apparatus and direct exposure method

2005-11-30

2009-02-03

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

Reexamination Certificate

active

07486383

ABSTRACT:
A direct exposure apparatus having a light source for projecting light onto an exposure target or, more specifically, an exposure target substrate, comprises: measuring means for measuring the illuminance distribution of light on an area corresponding to the exposure surface of the exposure target substrate; and control means for controlling, based on the measurement result supplied from the measuring means, the light source so that the intended illuminance distribution can be obtained.

REFERENCES:
patent: 7084977 (2006-08-01), Nomura
patent: 10-112579 (1998-04-01), None
patent: 2002-367900 (2002-12-01), None

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