Chucks or sockets – Vacuum
Patent
1997-02-07
1999-07-13
Pitts, Andrea L.
Chucks or sockets
Vacuum
269 21, 451388, B23B 522
Patent
active
059215607
ABSTRACT:
A rotational support assembly for holding and rotating an article. The assembly includes a support member for holding the article and a drive mechanism for rotating the support member. A drive shaft couples the drive mechanism directly to the support member. The assembly also includes a vacuum system including at least one passageway formed in the support member and the drive shaft. The passageway extends between an inlet in the shaft for coupling the passageway to a vacuum source and an outlet opening connected to the surface of the support member for holding the article against the support member by a vacuum.
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Pitts Andrea L.
Smith Monica
WJ Semiconductor Equipment Group, Inc.
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