Direct-coupled multimode WDM optical data links with...

Optical waveguides – With optical coupler – Particular coupling structure

Reexamination Certificate

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Reexamination Certificate

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06195485

ABSTRACT:

REFERENCE TO A MICROFICHE APPENDIX
Not Applicable
INCORPORATION BY REFERENCE
The following publications which are referred to herein using a number in square brackets (e.g., [1]) are incorporated herein by reference.
[1] S. Y. Hu, J. Ko, E. R. Hegblom, and L. A. Coldren, “Multimode WDM optical data links with monolithically-integrated multiple-channel VCSEL and photodetector arrays,”
IEEE J. Quantum Electron.,
vol. 34, pp.——, August 1998.
[2] S. Y. Hu, J. Ko, and L. A. Coldren, “High-performance densely-packed vertical-cavity photonic integrated emitter arrays for direct-coupled WDM applications,”
IEEE Photon. Technol. Leff.,
vol. 10, pp.766-768, June 1998.
[3] S. Y. Hu, J. Ko, E. R. Hegblom, and L. A. Coldren, “High-performance multiple-wavelength vertical-cavity photonic integrated emitter arrays for direct-coupled multimode optical links,”
Proc. CLEO'
98
conference,
San Francisco, Calif., May 3-8, 1998, paper no. CThK1, Invited.
[4] S. Y. Hu, S. Z. Zhang, J. Ko, J. E. Bowers, and L. A. Coldren, “1.5 Gb/s/ch operation of multiple-wavelength vertical-cavity photonic integrated emitter arrays for low-cost WDM local-area networks,”
Electron. Lett.,
vol. 34, No. 8, pp. 768-770, April 1998.
[5] S. Y. Hu, J. Ko, O. Sjolund, and L. A. Coldren, “Optical crosstalk in monolithically-integrated multiple-wavelength vertical-cavity laser arrays for multimode WDM local-area networks,”
Electron. Left.,
vol. 34, No. 7, pp. 676-678, April 1998.
[6] S. Y. Hu, E. R. Hegblom, and L. A. Coldren, “Multiple-wavelength top-emitting vertical-cavity photonic integrated emitter arrays for direct-coupled wavelength-division multiplexing applications”
Electron. Lett.,
vol. 34, No. 2, pp. 189-190, January 1998.
[7] L. A. Coldren, E. R. Hegblom, Y. A. Akulova, J. Ko, E. M. Strzelecka, and S. Y.
Hu, “VCSELs in '98: What we have and what we can expect,”
SPIE Proceedings,
San Jose, Calif., January 28-29, Vol. 3286, 1998.
[8] S. Y. Hu, E. R. Hegblom, and L. A. Coldren, “Multiple-wavelength top-emitting vertical-cavity laser arrays for wavelength-division multiplexing applications,”
Proc.
10
th IEEE LEOS annual meeting,
San Francisco, Calif., Nov. 10-13, 1997, postdeadline paper PD1-6.
[9] S. Y. Hu, J. Ko, and L. A. Coldren, “Pie-shaped resonant-cavity InGaAs/InAlGaAs/InP photodetector arrays for direct-coupled wavelength demultiplexing applications,”
Proc.
10
th IEEE LEOS annual meeting,
San Francisco, Calif., November 10-13, 1997, Paper TuJ4.
[10] S. Y. Hu, J. Ko, and L. A. Coldren, “1.55-&mgr;m pie-shaped resonant-cavity photodetector arrays for direct-coupled wavelength demultiplexing applications,”
Electron. Lett.,
vol. 33, pp. 1486-1488, August 1997.
[11] S. Y. Hu, E. R. Hegblom, and L. A. Coldren, “Coupled-cavity resonant photodetectors for high-performance wavelength demultiplexing applications,”
Appl. Phys. Lett.,
vol. 71, pp.178-180, July 1997.
[12] S. Y. Hu, J. Ko, and L. A. Coldren, “Resonant-cavity InGaAs/InAlGaAs/lnP photodetector arrays for wavelength demultiplexing applications,”
Appl. Phys. Lett.,
vol. 70, pp. 2347-2349, May 1997.
[13] E. C. Vail, G. S. Li, W. Yuen, and C. J. Chang-Hasnain, “High performance and novel effects of micromechanical tunable vertical-cavity lasers,”
IEEE J. Select. Topic Quantum Electron.,
vol. 3, pp. 691-697, 1997.
[14] T. Wipiejewski, J. Ko, B. J. Thibeault, and L. A. Coldren, “Multiple wavelength vertical-cavity laser array employing molecular beam epitaxial regrowth,”
Electron. Lett.,
vol. 32, pp. 340-342,1996.
[15] D. L. Huffaker and D. G. Deppe, “Multiwavelength, densely-packed 2×2 verticalcavity surface-emitting laser array fabricated using selective oxidation,”
IEEE Photon. Technol. Lett.,
vol. 7, pp. 858-860, 1996.
[16] W. Yuen, G. S. Li, and C. J. Chang-Hasnain, “Multiple-wavelength vertical-cavity surface-emitting laser arrays,”
IEEE J. Select. Topic Quantum Electron.,
vol. 3, pp. 422-428, 1997.
[17] A. Fiore, Y. A. Akulova, E. R. Hegblom, J. Ko, and L. A. Coldren, “postgrowth tuning of cavity resonance for multiple-wavelength laser and detector arrays”
Proc. CLEO'
98
conference,
San Francisco, Calif., May 3-8, 1998, paper no. CThX3.
[18] H. Hasegawa, K. E. Forward, and H. Hartnagel, “Improved method of anodic oxidation of GaAs”,
Electron. Left.,
Vol.11, pp. 53-54,1975.
[19] K. H. Hahn, M. R. T. Tan, Y. M. Houng, and S. Y. Wang, “Large area multitransverse-mode VCSELs for modal noise reduction in multimode fiber systems,”
Electron. Left.,
vol. 29, pp.1482-1483, 1993.
[20] C. A. Burrus and B. I. Miller, “Small-area double heterostructure AlGaAs electroluminescent diode sources for optical fiber transmission lines,”
Opt. Commun.,
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BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention pertains to device structures and simple packaging schemes to realize low-cost, yet high-performance, multimode wavelength-division multiplexing (WDM) optical data links.
2. Description of the Background Art
(a) Introduction
The demand for ever faster data transmission rates (a few Gb/s up to 100 Gb/s) has attracted considerable interest in the development of high-capacity optical data links for short-haul local-area networks and fiber-to-the-desktop applications. The majority of work to date has focused on one-dimensional parallel optical data links which utilize multimode fiber ribbons with a one-data-channel-per-fiber arrangement. However, the maximum aggregate data transmission rate is limited to about 2-3 gigabytes per second and the system configuration is costly and very complicated.
One definitive solution to the bandwidth problem is to take advantage of the extra-wide bandwidth of optical fibers by employing the wavelength-division multiplexing (WDM) configuration which can significantly expand the transmission capacity by having multiple data channels in each fiber. With WDM, however, the corresponding transmitter and receiver modules must be low cost to be attractive for emerging “gigabytes-to-the-desktop” applications. A problem with WDM is that any additional complexity in device fabrication and packaging technology can dramatically increase the manufacturing cost. The availability of such low-cost multiple-wavelength emitter and detector arrays is also a key issue for the realization of ultra-high-density multiple-layer digital versatile disk technology. Obviously, the vertical-cavity device structure is the ideal candidate for WDM configurations because the resonant wavelength can be easily varied and its fiber packaging is potentially low-cost.
(b) VCSEL Emitters in Optical Data Links
With the inherent advantages of its two-dimensional configuration, efficient fiber coupling, and on-wafer testing capability, VCSEL (Vertical-Cavity Surface-Emitting Laser) structures have remained the preferred candidate for free-space interconnects and optical fiber communication since inception. Within the last decade, there have been numerous advances in epitaxial technology, device design, and processing techniques such that the performance of VCSELs has been greatly improved. Currently, major accomplishments in VCSEL technology have been demonstrated in the 0.8-1.00 &mgr;m wavelength regime, where VCSELs are being incorporated into many advanced optical systems as a high-performance and yet low-cost solution for short-distance communications.
VCSELs are the ideal laser structures for the implementation of wavelength-division multiplexing (WDM) systems because the lasing wavelength can be easily varied by adjustment of the cavity length. However, due to the difficulty of achieving convenient and high-reflectivity distributed-Bragg reflector (DBR) mirrors in the longwave-length (1.3-1.55 &mgr;m) regime, in-plane distributed feedback (DFB) laser arrays have been the traditional structures in long-haul WDM optical communications. On the other hand, It is difficult to m

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