Direct contact heater for vacuum evaporation utilizing thermal e

Details Direct contact heater for vacuum evaporation utilizing thermal e Direct contact heater for vacuum evaporation utilizing thermal e

1991-04-05

1992-12-01

Walberg, Teresa J.

Electric resistance heating devices

Heating devices

Vaporizer

118726, 338316, C23C 1400, B01B 700

Patent

active

051685434

ABSTRACT:
An apparatus for evaporating materials to be deposited onto a substrate provides heat directly to the material to be evaporated by conduction and includes a means for compensating for thermal expansion and contraction of the heat source during thermal cycling. Direct heating provides a quicker response time which is critical for effective performance when making thin film semiconductors by elemental evaporation in a high vacuum chamber. Compensating for expansion leaves the heater uniform, devoid of hot or cold spots encountered when conventional heater elements buckle during thermal cycling.

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Miniflex Corporation Catalogue, 3 pages.

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