Stock material or miscellaneous articles – Hollow or container type article
Reexamination Certificate
2011-06-14
2011-06-14
O'Hern, Brent T (Department: 1783)
Stock material or miscellaneous articles
Hollow or container type article
C118S715000, C222S003000, C222S004000, C422S050000, C422S063000, C422S105000, C427S248100, C427S255280, C428S034000
Reexamination Certificate
active
07959994
ABSTRACT:
This invention relates to a vapor or liquid phase reagent dispensing apparatus having a diptube and also a metal seal aligned and in contact with hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.
REFERENCES:
patent: 3266311 (1966-08-01), Andersen et al.
patent: 3329447 (1967-07-01), Hitz
patent: 3826139 (1974-07-01), Bachman
patent: 3930591 (1976-01-01), Hawerkamp
patent: 4676404 (1987-06-01), Yamazaki et al.
patent: 4899585 (1990-02-01), Kulha
patent: 5102010 (1992-04-01), Osgar et al.
patent: 5366119 (1994-11-01), Kline
patent: 5366120 (1994-11-01), Tollasepp
patent: 5372754 (1994-12-01), Ono
patent: 5383970 (1995-01-01), Asaba et al.
patent: 5388574 (1995-02-01), Ingebrethsen
patent: 5435460 (1995-07-01), Osgar
patent: 5526956 (1996-06-01), Osgar
patent: 5582647 (1996-12-01), Kato et al.
patent: 5749500 (1998-05-01), Kraus et al.
patent: 6029717 (2000-02-01), Siegele et al.
patent: 6077356 (2000-06-01), Bouchard
patent: 6257446 (2001-07-01), Pike
patent: 6736154 (2004-05-01), Xu et al.
patent: 6905125 (2005-06-01), Shibata et al.
patent: 7077388 (2006-07-01), Stamp et al.
patent: 2002/0184945 (2002-12-01), Chase et al.
patent: 2003/0132257 (2003-07-01), Fiebig
patent: 2004/0007581 (2004-01-01), Nguyen et al.
patent: 2004/0028569 (2004-02-01), Zorich et al.
patent: 2004/0086642 (2004-05-01), Kesala
patent: 3428713 (1985-11-01), None
patent: WO 96/09483 (1996-03-01), None
patent: WO 01/98690 (2001-12-01), None
patent: WO 2005/054522 (2005-06-01), None
Peters David Walter
Spohn Ronald F.
O'Hern Brent T
Praxair Technology Inc.
Schwartz Iurie A.
LandOfFree
Diptube apparatus and delivery method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diptube apparatus and delivery method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diptube apparatus and delivery method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2630824