Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Patent
1996-03-01
1998-03-10
Czaja, Donald E.
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
118423, 118429, 118500, B05C 302, B05C 300, B05C 1300, B05C 2100
Patent
active
057256675
ABSTRACT:
There is disclosed a dip coating apparatus including: (a) a single coating vessel capable of containing a batch of substrates vertically positioned in the vessel, wherein there is absent vessel walls defining a separate compartment for each of the substrates; (b) a coating solution disposed in the vessel, wherein the solution is comprised of materials employed in a photosensitive member and including a solvent that gives off a solvent vapor; and (c) a solvent vapor uniformity control apparatus which minimizes any difference in solvent vapor concentration encountered by the batch of the substrates in the air adjacent the solution surface, thereby improving coating uniformity of the substrates.
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Foley Geoffrey M. T.
Foltz Robert S.
Kilmer David J.
Millonzi Richard P.
Petropoulos Mark C.
Czaja Donald E.
Ruller Jacqueline A.
Soong Zosan S.
Xerox Corporation
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