Dimension measurement method, method of manufacturing...

Details Dimension measurement method, method of manufacturing... Dimension measurement method, method of manufacturing...

2007-10-30

2007-10-30

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Cavities

C356S401000

Reexamination Certificate

active

10980285

ABSTRACT:
A dimension measurement method includes irradiating a measurement mark on a sample on which a pattern to be measured is formed with light from a measurement direction, detecting reflected diffracted light from the measurement mark to measure intensity thereof, and calculating a shape parameter of the pattern on the basis of the measured intensity, the measurement mark having measurement patterns which have the same shape as at least part of the pattern and are arranged in rows and columns, the columns being composed of the measurement patterns disposed with a predeter period in the direction perpendicular to the measurement direction, wherein a relation between a wavelength of the light and the period is adjusted so that the measurement mark generates the reflected diffracted light substantially the same as reflected diffracted light which would be generated when the column is assumed to be a continuous line pattern.

REFERENCES:
patent: 4236823 (1980-12-01), Roach et al.
patent: 4746792 (1988-05-01), Dil
patent: 5165045 (1992-11-01), Eselun
patent: 5900633 (1999-05-01), Solomon et al.
patent: 5963329 (1999-10-01), Conrad et al.
patent: 6483580 (2002-11-01), Xu et al.
patent: 6590656 (2003-07-01), Xu et al.
patent: 6608690 (2003-08-01), Niu et al.
patent: 6609086 (2003-08-01), Bao et al.
patent: 6721052 (2004-04-01), Zhao et al.
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 6775015 (2004-08-01), Bischoff et al.
patent: 6825924 (2004-11-01), Uda et al.
patent: 6850333 (2005-02-01), Johnson et al.
patent: 6867862 (2005-03-01), Nikoonahad
patent: 6952271 (2005-10-01), Niu et al.
patent: 7142282 (2006-11-01), Borodovsky
Stelzer, Ernst H. K., “Light Microscopy: Beyond the diffraction limit?”, Nature 417, 806-807, Jun. 20, 2002.

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