Digital x-ray detector and fabrication method thereof

Details Digital x-ray detector and fabrication method thereof Digital x-ray detector and fabrication method thereof

2008-10-28

2010-11-09

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

Reexamination Certificate

active

07829861

ABSTRACT:
A digital x-ray detector and its fabrication method are disclosed to strengthen an electrical connection between an upper electrode and a lower by employing a multi-contact hole structure and obtaining reliability of a contact hole by electrically connecting the side of the lower line and the upper electrode. A semiconductor layer is inserted at a lower portion of the contact hole to prevent damage of a gate insulating layer possibly caused by an overetch to thus reduce a defective contact.

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