Digital output force sensor using surface acoustic waves

Oscillators – With device responsive to external physical condition

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Details

73 885R, 73DIG4, 331 40, 331107A, 333 72, G01L 116, H03B 532, H03B 2100

Patent

active

041076265

ABSTRACT:
A sensor developing a digital output in response to force induced deflection in which the deflection is of a beam formed to have, under stress, a surface undulate in both compression and tension. The signal is developed from piezoelectric transducers connected in a pair of oscillator circuits utilizing surface acoustic wave paths through, respectively, the tension and the compression portions of the beam surface. The frequencies of the oscillators are compared and the frequency difference resulting from beam deflection is sent as a signal to a counter to give a digital read out of the force causing the deflection. The beam is formed of steel and the piezoelectric surface for the surface waves and the interdigitated conductors forming the transducers are deposited by thin film techniques on the beam.

REFERENCES:
patent: 3341796 (1967-09-01), Eisele
patent: 3786373 (1974-01-01), Schulz et al.
patent: 3868608 (1975-02-01), Williams
patent: 3878477 (1975-04-01), Dias et al.
patent: 3916348 (1975-10-01), Toda et al.

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