Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2007-06-26
2007-06-26
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S201100, C359S224200, C310S309000, C385S018000
Reexamination Certificate
active
10273628
ABSTRACT:
The present invention provides a digital optical switch apparatus and process for manufacturing the apparatus. The apparatus includes a mirror assembly coupled to a top cap and to a bottom cap. The top and bottom caps each include one or more electrodes that, when energized with electrical energy, move a mirrored surface to one of a plurality of discrete positions. Mirror assemblies can be cascaded to create a packaged assembly having any multiple of discrete positions. The process includes planar micro-machining techniques to create isolated islands for electrical feed through. The process enables mechanical bonding of multiple tiers via a single bond region and through a bond-pad window.
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S. Kurth et al.;Synchronously Working Micromirrors for Beam Steering—Design and Application Aspects, XP-002310357, SPIE Conference on Optical Scanning: Design and Application, Denver, Colorado, SPIE vol. 3787,0277-786X, Jul. 1999, pp. 63-73.
Goldberg Howard
Selvakumar Arjun
Yi Taechung
Yu Duli
Input / Output Inc.
Madan Mossman & Sriram P.C.
Phan James
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