Digital micromirror device having mirror-attached spring tips

Details Digital micromirror device having mirror-attached spring tips Digital micromirror device having mirror-attached spring tips

2005-02-15

2005-02-15

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S223100, C359S224200

Reexamination Certificate

active

06856446

ABSTRACT:
A micromirror array110fabricated on a semiconductor substrate11.The array110is comprised of three operating layers12, 13, 14.An addressing layer12is fabricated on the substrate. A hinge layer13is spaced above the addressing layer12by an air gap. A mirror layer14is spaced over the hinge layer13by a second air gap. The hinge layer13has a hinge13aunder and attached to the mirror14a, the hinge13apermitting the mirror14ato tilt. Spring tips13cunder the mirror14aare attached to the underside of the mirror14a. These spring tips13ctilt with the mirror14aand provide a landing point for the mirror14aonto a surface of the underlying pixel element structure.

REFERENCES:
patent: 5583688 (1996-12-01), Hornbeck
patent: 5867202 (1999-02-01), Knipe et al.
patent: 6028690 (2000-02-01), Carter et al.
patent: 6781094 (2004-08-01), Harper
patent: 20030095318 (2003-05-01), DiCarlo et al.
patent: 20040125347 (2004-07-01), Patel et al.
patent: 20040136044 (2004-07-01), Miller et al.
patent: 20040164980 (2004-08-01), Hewlett
patent: 20040165250 (2004-08-01), Aubuchon
patent: 20040184132 (2004-09-01), Novotny et al.
U.S. Appl. No. 10/298,423, filed Nov. 18, 2002, DiCarlo et al.

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